10/15/2011	9:55:49 AM	Main Vac valve closed
10/15/2011	9:56:13 AM	Main Vac valve opened
10/15/2011	9:57:26 AM	Recipe started at 9:57 AM
10/15/2011	9:57:26 AM	Helium valve closed
10/15/2011	9:57:26 AM	H2 valve closed
10/15/2011	9:57:26 AM	BCl3 valve closed
10/15/2011	9:57:26 AM	PH3 valve closed
10/15/2011	9:57:26 AM	SiCl4 pre valve closed
10/15/2011	9:57:26 AM	SiCl4 post valve closed
10/15/2011	9:57:26 AM	Main Vac valve closed
10/15/2011	9:57:26 AM	Bypass valve closed
10/15/2011	9:57:26 AM	Bubbler valve closed
10/15/2011	9:57:26 AM	Helium MFC set to  0.000000
10/15/2011	9:57:26 AM	H2 MFC set to  0.000000
10/15/2011	9:57:26 AM	BCl3 MFC set to  0.000000
10/15/2011	9:57:26 AM	PHl3 MFC set to  0.000000
10/15/2011	9:57:26 AM	SiCl4 MFC set to  0.000000
10/15/2011	9:57:26 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:57:26 AM	Tube furnace set to 0
10/15/2011	9:57:29 AM	Helium valve closed
10/15/2011	9:57:29 AM	BCl3 valve closed
10/15/2011	9:57:29 AM	PH3 valve closed
10/15/2011	9:57:29 AM	SiCl4 pre valve closed
10/15/2011	9:57:29 AM	SiCl4 post valve closed
10/15/2011	9:57:29 AM	Main Vac valve closed
10/15/2011	9:57:29 AM	Bypass valve closed
10/15/2011	9:57:29 AM	Bubbler valve closed
10/15/2011	9:57:29 AM	H2 valve opened
10/15/2011	9:57:29 AM	Helium MFC set to  0.000000
10/15/2011	9:57:29 AM	H2 MFC set to  500.000000
10/15/2011	9:57:29 AM	BCl3 MFC set to  0.000000
10/15/2011	9:57:29 AM	PHl3 MFC set to  0.000000
10/15/2011	9:57:29 AM	SiCl4 MFC set to  0.000000
10/15/2011	9:57:29 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:57:29 AM	Tube furnace set to 0
10/15/2011	9:58:37 AM	Helium valve closed
10/15/2011	9:58:37 AM	BCl3 valve closed
10/15/2011	9:58:37 AM	PH3 valve closed
10/15/2011	9:58:37 AM	SiCl4 pre valve closed
10/15/2011	9:58:37 AM	SiCl4 post valve closed
10/15/2011	9:58:37 AM	Main Vac valve closed
10/15/2011	9:58:37 AM	Bypass valve closed
10/15/2011	9:58:37 AM	H2 valve opened
10/15/2011	9:58:37 AM	Bubbler valve opened
10/15/2011	9:58:37 AM	Helium MFC set to  0.000000
10/15/2011	9:58:37 AM	H2 MFC set to  500.000000
10/15/2011	9:58:37 AM	BCl3 MFC set to  0.000000
10/15/2011	9:58:37 AM	PHl3 MFC set to  0.000000
10/15/2011	9:58:37 AM	SiCl4 MFC set to  0.000000
10/15/2011	9:58:37 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:58:38 AM	Tube furnace set to 0
10/15/2011	9:58:39 AM	Helium valve closed
10/15/2011	9:58:39 AM	BCl3 valve closed
10/15/2011	9:58:39 AM	PH3 valve closed
10/15/2011	9:58:39 AM	SiCl4 pre valve closed
10/15/2011	9:58:39 AM	SiCl4 post valve closed
10/15/2011	9:58:39 AM	Main Vac valve closed
10/15/2011	9:58:39 AM	Bypass valve closed
10/15/2011	9:58:39 AM	H2 valve opened
10/15/2011	9:58:39 AM	Bubbler valve opened
10/15/2011	9:58:39 AM	Helium MFC set to  0.000000
10/15/2011	9:58:39 AM	H2 MFC set to  500.000000
10/15/2011	9:58:39 AM	BCl3 MFC set to  0.000000
10/15/2011	9:58:39 AM	PHl3 MFC set to  0.000000
10/15/2011	9:58:39 AM	SiCl4 MFC set to  0.000000
10/15/2011	9:58:39 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:58:39 AM	Tube furnace set to 1000
10/15/2011	10:18:39 AM	Helium valve closed
10/15/2011	10:18:39 AM	BCl3 valve closed
10/15/2011	10:18:39 AM	PH3 valve closed
10/15/2011	10:18:39 AM	Main Vac valve closed
10/15/2011	10:18:39 AM	Bypass valve closed
10/15/2011	10:18:39 AM	H2 valve opened
10/15/2011	10:18:39 AM	SiCl4 pre valve opened
10/15/2011	10:18:39 AM	SiCl4 post valve opened
10/15/2011	10:18:39 AM	Bubbler valve opened
10/15/2011	10:18:39 AM	Helium MFC set to  0.000000
10/15/2011	10:18:39 AM	H2 MFC set to  500.000000
10/15/2011	10:18:39 AM	BCl3 MFC set to  0.000000
10/15/2011	10:18:39 AM	PHl3 MFC set to  0.000000
10/15/2011	10:18:39 AM	SiCl4 MFC set to  50.000000
10/15/2011	10:18:39 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	10:18:39 AM	Tube furnace set to 1000
10/15/2011	10:32:39 AM	Helium valve closed
10/15/2011	10:32:39 AM	BCl3 valve closed
10/15/2011	10:32:39 AM	PH3 valve closed
10/15/2011	10:32:39 AM	SiCl4 pre valve closed
10/15/2011	10:32:39 AM	SiCl4 post valve closed
10/15/2011	10:32:39 AM	Main Vac valve closed
10/15/2011	10:32:39 AM	Bypass valve closed
10/15/2011	10:32:39 AM	H2 valve opened
10/15/2011	10:32:39 AM	Bubbler valve opened
10/15/2011	10:32:39 AM	Helium MFC set to  0.000000
10/15/2011	10:32:39 AM	H2 MFC set to  500.000000
10/15/2011	10:32:39 AM	BCl3 MFC set to  0.000000
10/15/2011	10:32:39 AM	PHl3 MFC set to  0.000000
10/15/2011	10:32:39 AM	SiCl4 MFC set to  0.000000
10/15/2011	10:32:39 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	10:32:39 AM	Tube furnace set to 750
10/15/2011	10:37:39 AM	H2 valve closed
10/15/2011	10:37:39 AM	BCl3 valve closed
10/15/2011	10:37:39 AM	PH3 valve closed
10/15/2011	10:37:39 AM	SiCl4 pre valve closed
10/15/2011	10:37:39 AM	SiCl4 post valve closed
10/15/2011	10:37:39 AM	Main Vac valve closed
10/15/2011	10:37:39 AM	Bypass valve closed
10/15/2011	10:37:39 AM	Helium valve opened
10/15/2011	10:37:39 AM	Bubbler valve opened
10/15/2011	10:37:39 AM	Helium MFC set to  500.000000
10/15/2011	10:37:39 AM	H2 MFC set to  0.000000
10/15/2011	10:37:39 AM	BCl3 MFC set to  0.000000
10/15/2011	10:37:39 AM	PHl3 MFC set to  0.000000
10/15/2011	10:37:39 AM	SiCl4 MFC set to  0.000000
10/15/2011	10:37:39 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	10:37:39 AM	Tube furnace set to 0
10/15/2011	10:57:39 AM	Helium valve closed
10/15/2011	10:57:39 AM	H2 valve closed
10/15/2011	10:57:39 AM	BCl3 valve closed
10/15/2011	10:57:39 AM	PH3 valve closed
10/15/2011	10:57:39 AM	SiCl4 pre valve closed
10/15/2011	10:57:39 AM	SiCl4 post valve closed
10/15/2011	10:57:39 AM	Main Vac valve closed
10/15/2011	10:57:39 AM	Bypass valve closed
10/15/2011	10:57:39 AM	Bubbler valve closed
10/15/2011	10:57:39 AM	Helium MFC set to  0.000000
10/15/2011	10:57:39 AM	H2 MFC set to  0.000000
10/15/2011	10:57:39 AM	BCl3 MFC set to  0.000000
10/15/2011	10:57:39 AM	PHl3 MFC set to  0.000000
10/15/2011	10:57:39 AM	SiCl4 MFC set to  0.000000
10/15/2011	10:57:39 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	10:57:40 AM	Tube furnace set to 0
10/15/2011	11:04:52 AM	Run aborted at 11:04 AM
10/15/2011	11:04:52 AM	Helium valve closed
10/15/2011	11:04:52 AM	H2 valve closed
10/15/2011	11:04:52 AM	BCl3 valve closed
10/15/2011	11:04:52 AM	PH3 valve closed
10/15/2011	11:04:52 AM	SiCl4 pre valve closed
10/15/2011	11:04:52 AM	SiCl4 post valve closed
10/15/2011	11:04:52 AM	Bypass valve closed
10/15/2011	11:04:52 AM	Main Vac valve closed
10/15/2011	11:04:52 AM	Bubbler valve closed
10/15/2011	11:04:52 AM	Helium MFC set to  0.000000
10/15/2011	11:04:52 AM	H2 MFC set to  0.000000
10/15/2011	11:04:52 AM	BCl3 MFC set to  0.000000
10/15/2011	11:04:52 AM	PHl3 MFC set to  0.000000
10/15/2011	11:04:52 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:04:52 AM	Tube furnace set to 0
10/15/2011	11:04:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	11:04:54 AM	Recipe started at 11:04 AM
10/15/2011	11:04:54 AM	Helium valve closed
10/15/2011	11:04:54 AM	H2 valve closed
10/15/2011	11:04:54 AM	BCl3 valve closed
10/15/2011	11:04:54 AM	PH3 valve closed
10/15/2011	11:04:54 AM	SiCl4 pre valve closed
10/15/2011	11:04:54 AM	SiCl4 post valve closed
10/15/2011	11:04:54 AM	Main Vac valve closed
10/15/2011	11:04:54 AM	Bypass valve closed
10/15/2011	11:04:54 AM	Bubbler valve closed
10/15/2011	11:04:54 AM	Helium MFC set to  0.000000
10/15/2011	11:04:54 AM	H2 MFC set to  0.000000
10/15/2011	11:04:54 AM	BCl3 MFC set to  0.000000
10/15/2011	11:04:54 AM	PHl3 MFC set to  0.000000
10/15/2011	11:04:54 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:04:54 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:04:54 AM	Tube furnace set to 0
10/15/2011	11:04:57 AM	H2 valve closed
10/15/2011	11:04:57 AM	BCl3 valve closed
10/15/2011	11:04:57 AM	PH3 valve closed
10/15/2011	11:04:57 AM	SiCl4 pre valve closed
10/15/2011	11:04:57 AM	SiCl4 post valve closed
10/15/2011	11:04:57 AM	Main Vac valve closed
10/15/2011	11:04:57 AM	Bypass valve closed
10/15/2011	11:04:57 AM	Bubbler valve closed
10/15/2011	11:04:57 AM	Helium valve opened
10/15/2011	11:04:57 AM	Helium MFC set to  500.000000
10/15/2011	11:04:57 AM	H2 MFC set to  0.000000
10/15/2011	11:04:57 AM	BCl3 MFC set to  0.000000
10/15/2011	11:04:57 AM	PHl3 MFC set to  0.000000
10/15/2011	11:04:57 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:04:57 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:04:58 AM	Tube furnace set to 0
10/15/2011	11:05:00 AM	Helium valve closed
10/15/2011	11:05:00 AM	H2 valve closed
10/15/2011	11:05:00 AM	BCl3 valve closed
10/15/2011	11:05:00 AM	PH3 valve closed
10/15/2011	11:05:00 AM	SiCl4 pre valve closed
10/15/2011	11:05:00 AM	SiCl4 post valve closed
10/15/2011	11:05:00 AM	Main Vac valve closed
10/15/2011	11:05:00 AM	Bypass valve closed
10/15/2011	11:05:00 AM	Bubbler valve closed
10/15/2011	11:05:00 AM	Helium MFC set to  0.000000
10/15/2011	11:05:00 AM	H2 MFC set to  0.000000
10/15/2011	11:05:00 AM	BCl3 MFC set to  0.000000
10/15/2011	11:05:00 AM	PHl3 MFC set to  0.000000
10/15/2011	11:05:00 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:05:00 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:05:00 AM	Tube furnace set to 0
10/15/2011	11:05:01 AM	Run finished at 11:05 AM
10/15/2011	11:05:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	11:11:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	11:11:49 AM	Recipe started at 11:11 AM
10/15/2011	11:11:49 AM	Helium valve closed
10/15/2011	11:11:49 AM	H2 valve closed
10/15/2011	11:11:49 AM	BCl3 valve closed
10/15/2011	11:11:49 AM	PH3 valve closed
10/15/2011	11:11:49 AM	SiCl4 pre valve closed
10/15/2011	11:11:49 AM	SiCl4 post valve closed
10/15/2011	11:11:49 AM	Main Vac valve closed
10/15/2011	11:11:49 AM	Bypass valve closed
10/15/2011	11:11:49 AM	Bubbler valve closed
10/15/2011	11:11:49 AM	Helium MFC set to  0.000000
10/15/2011	11:11:49 AM	H2 MFC set to  0.000000
10/15/2011	11:11:49 AM	BCl3 MFC set to  0.000000
10/15/2011	11:11:49 AM	PHl3 MFC set to  0.000000
10/15/2011	11:11:49 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:11:49 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:11:49 AM	Tube furnace set to 0
10/15/2011	11:11:52 AM	H2 valve closed
10/15/2011	11:11:52 AM	BCl3 valve closed
10/15/2011	11:11:52 AM	PH3 valve closed
10/15/2011	11:11:52 AM	SiCl4 pre valve closed
10/15/2011	11:11:52 AM	SiCl4 post valve closed
10/15/2011	11:11:52 AM	Main Vac valve closed
10/15/2011	11:11:52 AM	Bypass valve closed
10/15/2011	11:11:52 AM	Bubbler valve closed
10/15/2011	11:11:52 AM	Helium valve opened
10/15/2011	11:11:52 AM	Helium MFC set to  500.000000
10/15/2011	11:11:52 AM	H2 MFC set to  0.000000
10/15/2011	11:11:52 AM	BCl3 MFC set to  0.000000
10/15/2011	11:11:52 AM	PHl3 MFC set to  0.000000
10/15/2011	11:11:52 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:11:52 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:11:52 AM	Tube furnace set to 0
10/15/2011	11:11:55 AM	Helium valve closed
10/15/2011	11:11:55 AM	H2 valve closed
10/15/2011	11:11:55 AM	BCl3 valve closed
10/15/2011	11:11:55 AM	PH3 valve closed
10/15/2011	11:11:55 AM	SiCl4 pre valve closed
10/15/2011	11:11:55 AM	SiCl4 post valve closed
10/15/2011	11:11:55 AM	Main Vac valve closed
10/15/2011	11:11:55 AM	Bypass valve closed
10/15/2011	11:11:55 AM	Bubbler valve closed
10/15/2011	11:11:55 AM	Helium MFC set to  0.000000
10/15/2011	11:11:55 AM	H2 MFC set to  0.000000
10/15/2011	11:11:55 AM	BCl3 MFC set to  0.000000
10/15/2011	11:11:55 AM	PHl3 MFC set to  0.000000
10/15/2011	11:11:55 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:11:55 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:11:55 AM	Tube furnace set to 0
10/15/2011	11:11:56 AM	Run finished at 11:11 AM
10/15/2011	11:11:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	11:13:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	11:13:48 AM	Recipe started at 11:13 AM
10/15/2011	11:13:48 AM	Helium valve closed
10/15/2011	11:13:48 AM	H2 valve closed
10/15/2011	11:13:48 AM	BCl3 valve closed
10/15/2011	11:13:48 AM	PH3 valve closed
10/15/2011	11:13:48 AM	SiCl4 pre valve closed
10/15/2011	11:13:48 AM	SiCl4 post valve closed
10/15/2011	11:13:48 AM	Main Vac valve closed
10/15/2011	11:13:48 AM	Bubbler valve closed
10/15/2011	11:13:48 AM	Bypass valve opened
10/15/2011	11:13:48 AM	Helium MFC set to  0.000000
10/15/2011	11:13:48 AM	H2 MFC set to  0.000000
10/15/2011	11:13:48 AM	BCl3 MFC set to  0.000000
10/15/2011	11:13:48 AM	PHl3 MFC set to  0.000000
10/15/2011	11:13:48 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:13:48 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:13:48 AM	Tube furnace set to 0
10/15/2011	11:14:52 AM	Helium valve closed
10/15/2011	11:14:52 AM	H2 valve closed
10/15/2011	11:14:52 AM	BCl3 valve closed
10/15/2011	11:14:52 AM	PH3 valve closed
10/15/2011	11:14:52 AM	SiCl4 pre valve closed
10/15/2011	11:14:52 AM	SiCl4 post valve closed
10/15/2011	11:14:52 AM	Main Vac valve closed
10/15/2011	11:14:52 AM	Bubbler valve closed
10/15/2011	11:14:52 AM	Bypass valve opened
10/15/2011	11:14:52 AM	Helium MFC set to  0.000000
10/15/2011	11:14:52 AM	H2 MFC set to  0.000000
10/15/2011	11:14:52 AM	BCl3 MFC set to  0.000000
10/15/2011	11:14:52 AM	PHl3 MFC set to  0.000000
10/15/2011	11:14:52 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:14:52 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:14:52 AM	Tube furnace set to 0
10/15/2011	11:15:52 AM	Helium valve closed
10/15/2011	11:15:52 AM	H2 valve closed
10/15/2011	11:15:52 AM	BCl3 valve closed
10/15/2011	11:15:52 AM	PH3 valve closed
10/15/2011	11:15:52 AM	SiCl4 pre valve closed
10/15/2011	11:15:52 AM	SiCl4 post valve closed
10/15/2011	11:15:52 AM	Bypass valve closed
10/15/2011	11:15:52 AM	Bubbler valve closed
10/15/2011	11:15:52 AM	Main Vac valve opened
10/15/2011	11:15:52 AM	Helium MFC set to  0.000000
10/15/2011	11:15:52 AM	H2 MFC set to  0.000000
10/15/2011	11:15:52 AM	BCl3 MFC set to  0.000000
10/15/2011	11:15:52 AM	PHl3 MFC set to  0.000000
10/15/2011	11:15:52 AM	SiCl4 MFC set to  0.000000
10/15/2011	11:15:52 AM	Bypass solenoid MFC set to  0.000000
10/15/2011	11:15:52 AM	Tube furnace set to 0
10/15/2011	11:15:53 AM	Run finished at 11:15 AM
10/15/2011	11:15:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	2:02:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	2:02:41 PM	Recipe started at 2:02 PM
10/15/2011	2:02:41 PM	Helium valve closed
10/15/2011	2:02:41 PM	H2 valve closed
10/15/2011	2:02:41 PM	BCl3 valve closed
10/15/2011	2:02:41 PM	PH3 valve closed
10/15/2011	2:02:41 PM	SiCl4 pre valve closed
10/15/2011	2:02:41 PM	SiCl4 post valve closed
10/15/2011	2:02:41 PM	Main Vac valve closed
10/15/2011	2:02:41 PM	Bypass valve closed
10/15/2011	2:02:41 PM	Bubbler valve closed
10/15/2011	2:02:41 PM	Helium MFC set to  0.000000
10/15/2011	2:02:41 PM	H2 MFC set to  0.000000
10/15/2011	2:02:41 PM	BCl3 MFC set to  0.000000
10/15/2011	2:02:41 PM	PHl3 MFC set to  0.000000
10/15/2011	2:02:41 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:02:41 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:02:41 PM	Tube furnace set to 0
10/15/2011	2:02:44 PM	H2 valve closed
10/15/2011	2:02:44 PM	BCl3 valve closed
10/15/2011	2:02:44 PM	PH3 valve closed
10/15/2011	2:02:44 PM	SiCl4 pre valve closed
10/15/2011	2:02:44 PM	SiCl4 post valve closed
10/15/2011	2:02:44 PM	Main Vac valve closed
10/15/2011	2:02:44 PM	Bypass valve closed
10/15/2011	2:02:44 PM	Bubbler valve closed
10/15/2011	2:02:44 PM	Helium valve opened
10/15/2011	2:02:44 PM	Helium MFC set to  500.000000
10/15/2011	2:02:44 PM	H2 MFC set to  0.000000
10/15/2011	2:02:44 PM	BCl3 MFC set to  0.000000
10/15/2011	2:02:44 PM	PHl3 MFC set to  0.000000
10/15/2011	2:02:44 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:02:44 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:02:44 PM	Tube furnace set to 0
10/15/2011	2:03:49 PM	Helium valve closed
10/15/2011	2:03:49 PM	H2 valve closed
10/15/2011	2:03:49 PM	BCl3 valve closed
10/15/2011	2:03:49 PM	PH3 valve closed
10/15/2011	2:03:49 PM	SiCl4 pre valve closed
10/15/2011	2:03:49 PM	SiCl4 post valve closed
10/15/2011	2:03:49 PM	Main Vac valve closed
10/15/2011	2:03:49 PM	Bypass valve closed
10/15/2011	2:03:49 PM	Bubbler valve closed
10/15/2011	2:03:49 PM	Helium MFC set to  0.000000
10/15/2011	2:03:49 PM	H2 MFC set to  0.000000
10/15/2011	2:03:49 PM	BCl3 MFC set to  0.000000
10/15/2011	2:03:49 PM	PHl3 MFC set to  0.000000
10/15/2011	2:03:49 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:03:49 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:03:50 PM	Tube furnace set to 0
10/15/2011	2:03:51 PM	Run finished at 2:03 PM
10/15/2011	2:03:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	2:09:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	2:09:59 PM	Recipe started at 2:09 PM
10/15/2011	2:09:59 PM	Helium valve closed
10/15/2011	2:09:59 PM	H2 valve closed
10/15/2011	2:09:59 PM	BCl3 valve closed
10/15/2011	2:09:59 PM	PH3 valve closed
10/15/2011	2:09:59 PM	SiCl4 pre valve closed
10/15/2011	2:09:59 PM	SiCl4 post valve closed
10/15/2011	2:09:59 PM	Main Vac valve closed
10/15/2011	2:09:59 PM	Bubbler valve closed
10/15/2011	2:09:59 PM	Bypass valve opened
10/15/2011	2:09:59 PM	Helium MFC set to  0.000000
10/15/2011	2:09:59 PM	H2 MFC set to  0.000000
10/15/2011	2:09:59 PM	BCl3 MFC set to  0.000000
10/15/2011	2:09:59 PM	PHl3 MFC set to  0.000000
10/15/2011	2:09:59 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:09:59 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:09:59 PM	Tube furnace set to 0
10/15/2011	2:10:58 PM	Run aborted at 2:10 PM
10/15/2011	2:10:58 PM	Helium valve closed
10/15/2011	2:10:58 PM	H2 valve closed
10/15/2011	2:10:58 PM	BCl3 valve closed
10/15/2011	2:10:58 PM	PH3 valve closed
10/15/2011	2:10:58 PM	SiCl4 pre valve closed
10/15/2011	2:10:58 PM	SiCl4 post valve closed
10/15/2011	2:10:58 PM	Bypass valve closed
10/15/2011	2:10:58 PM	Main Vac valve closed
10/15/2011	2:10:58 PM	Bubbler valve closed
10/15/2011	2:10:58 PM	Helium MFC set to  0.000000
10/15/2011	2:10:58 PM	H2 MFC set to  0.000000
10/15/2011	2:10:58 PM	BCl3 MFC set to  0.000000
10/15/2011	2:10:58 PM	PHl3 MFC set to  0.000000
10/15/2011	2:10:58 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:10:58 PM	Tube furnace set to 0
10/15/2011	2:10:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	2:11:01 PM	Bypass valve opened
10/15/2011	2:11:09 PM	Helium MFC set to  500.000000
10/15/2011	2:11:11 PM	Helium valve opened
10/15/2011	2:11:22 PM	SiCl4 MFC set to  50.000000
10/15/2011	2:11:59 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:14:13 PM	SiCl4 MFC set to  50.000000
10/15/2011	2:16:36 PM	Main Vac valve opened
10/15/2011	2:16:38 PM	Bypass valve closed
10/15/2011	2:18:01 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:18:21 PM	SiCl4 MFC set to  50.000000
10/15/2011	2:40:10 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:40:16 PM	Helium valve closed
10/15/2011	2:40:19 PM	Helium MFC set to  0.000000
10/15/2011	2:42:42 PM	Main Vac valve closed
10/15/2011	2:42:48 PM	SiCl4 MFC set to  50.000000
10/15/2011	2:43:09 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:44:08 PM	Helium MFC set to  500.000000
10/15/2011	2:44:13 PM	Helium valve opened
10/15/2011	2:45:31 PM	Helium valve closed
10/15/2011	2:45:34 PM	Helium MFC set to  0.000000
10/15/2011	2:45:46 PM	SiCl4 MFC set to  50.000000
10/15/2011	2:46:02 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:46:33 PM	Helium MFC set to  500.000000
10/15/2011	2:46:44 PM	Helium valve opened
10/15/2011	2:46:45 PM	Bubbler valve opened
10/15/2011	2:47:08 PM	SiCl4 MFC set to  50.000000
10/15/2011	2:47:19 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:47:23 PM	Bubbler valve closed
10/15/2011	2:47:23 PM	Helium valve closed
10/15/2011	2:47:27 PM	Helium MFC set to  0.000000
10/15/2011	2:49:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	2:49:23 PM	Recipe started at 2:49 PM
10/15/2011	2:49:23 PM	Helium valve closed
10/15/2011	2:49:23 PM	H2 valve closed
10/15/2011	2:49:23 PM	BCl3 valve closed
10/15/2011	2:49:23 PM	PH3 valve closed
10/15/2011	2:49:23 PM	SiCl4 pre valve closed
10/15/2011	2:49:23 PM	SiCl4 post valve closed
10/15/2011	2:49:23 PM	Main Vac valve closed
10/15/2011	2:49:23 PM	Bubbler valve closed
10/15/2011	2:49:23 PM	Bypass valve opened
10/15/2011	2:49:23 PM	Helium MFC set to  0.000000
10/15/2011	2:49:23 PM	H2 MFC set to  0.000000
10/15/2011	2:49:23 PM	BCl3 MFC set to  0.000000
10/15/2011	2:49:23 PM	PHl3 MFC set to  0.000000
10/15/2011	2:49:23 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:49:23 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:49:23 PM	Tube furnace set to 0
10/15/2011	2:50:26 PM	Helium valve closed
10/15/2011	2:50:26 PM	H2 valve closed
10/15/2011	2:50:26 PM	BCl3 valve closed
10/15/2011	2:50:26 PM	PH3 valve closed
10/15/2011	2:50:26 PM	SiCl4 pre valve closed
10/15/2011	2:50:26 PM	SiCl4 post valve closed
10/15/2011	2:50:26 PM	Main Vac valve closed
10/15/2011	2:50:26 PM	Bubbler valve closed
10/15/2011	2:50:26 PM	Bypass valve opened
10/15/2011	2:50:26 PM	Helium MFC set to  0.000000
10/15/2011	2:50:26 PM	H2 MFC set to  0.000000
10/15/2011	2:50:26 PM	BCl3 MFC set to  0.000000
10/15/2011	2:50:26 PM	PHl3 MFC set to  0.000000
10/15/2011	2:50:26 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:50:26 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:50:26 PM	Tube furnace set to 0
10/15/2011	2:51:26 PM	Helium valve closed
10/15/2011	2:51:26 PM	H2 valve closed
10/15/2011	2:51:26 PM	BCl3 valve closed
10/15/2011	2:51:26 PM	PH3 valve closed
10/15/2011	2:51:26 PM	SiCl4 pre valve closed
10/15/2011	2:51:26 PM	SiCl4 post valve closed
10/15/2011	2:51:26 PM	Bypass valve closed
10/15/2011	2:51:26 PM	Bubbler valve closed
10/15/2011	2:51:26 PM	Main Vac valve opened
10/15/2011	2:51:26 PM	Helium MFC set to  0.000000
10/15/2011	2:51:26 PM	H2 MFC set to  0.000000
10/15/2011	2:51:26 PM	BCl3 MFC set to  0.000000
10/15/2011	2:51:26 PM	PHl3 MFC set to  0.000000
10/15/2011	2:51:26 PM	SiCl4 MFC set to  0.000000
10/15/2011	2:51:26 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	2:51:26 PM	Tube furnace set to 0
10/15/2011	2:51:27 PM	Run finished at 2:51 PM
10/15/2011	2:51:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	4:17:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	4:17:27 PM	Recipe started at 4:17 PM
10/15/2011	4:17:27 PM	Helium valve closed
10/15/2011	4:17:27 PM	H2 valve closed
10/15/2011	4:17:27 PM	BCl3 valve closed
10/15/2011	4:17:27 PM	PH3 valve closed
10/15/2011	4:17:27 PM	SiCl4 pre valve closed
10/15/2011	4:17:27 PM	SiCl4 post valve closed
10/15/2011	4:17:27 PM	Main Vac valve closed
10/15/2011	4:17:27 PM	Bypass valve closed
10/15/2011	4:17:27 PM	Bubbler valve closed
10/15/2011	4:17:27 PM	Helium MFC set to  0.000000
10/15/2011	4:17:27 PM	H2 MFC set to  0.000000
10/15/2011	4:17:27 PM	BCl3 MFC set to  0.000000
10/15/2011	4:17:27 PM	PHl3 MFC set to  0.000000
10/15/2011	4:17:27 PM	SiCl4 MFC set to  0.000000
10/15/2011	4:17:27 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	4:17:27 PM	Tube furnace set to 0
10/15/2011	4:17:30 PM	H2 valve closed
10/15/2011	4:17:30 PM	BCl3 valve closed
10/15/2011	4:17:30 PM	PH3 valve closed
10/15/2011	4:17:30 PM	SiCl4 pre valve closed
10/15/2011	4:17:30 PM	SiCl4 post valve closed
10/15/2011	4:17:30 PM	Main Vac valve closed
10/15/2011	4:17:30 PM	Bypass valve closed
10/15/2011	4:17:30 PM	Bubbler valve closed
10/15/2011	4:17:30 PM	Helium valve opened
10/15/2011	4:17:30 PM	Helium MFC set to  500.000000
10/15/2011	4:17:30 PM	H2 MFC set to  0.000000
10/15/2011	4:17:30 PM	BCl3 MFC set to  0.000000
10/15/2011	4:17:30 PM	PHl3 MFC set to  0.000000
10/15/2011	4:17:30 PM	SiCl4 MFC set to  0.000000
10/15/2011	4:17:30 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	4:17:30 PM	Tube furnace set to 0
10/15/2011	4:18:37 PM	Helium valve closed
10/15/2011	4:18:37 PM	H2 valve closed
10/15/2011	4:18:37 PM	BCl3 valve closed
10/15/2011	4:18:37 PM	PH3 valve closed
10/15/2011	4:18:37 PM	SiCl4 pre valve closed
10/15/2011	4:18:37 PM	SiCl4 post valve closed
10/15/2011	4:18:37 PM	Main Vac valve closed
10/15/2011	4:18:37 PM	Bypass valve closed
10/15/2011	4:18:37 PM	Bubbler valve closed
10/15/2011	4:18:37 PM	Helium MFC set to  0.000000
10/15/2011	4:18:37 PM	H2 MFC set to  0.000000
10/15/2011	4:18:37 PM	BCl3 MFC set to  0.000000
10/15/2011	4:18:37 PM	PHl3 MFC set to  0.000000
10/15/2011	4:18:37 PM	SiCl4 MFC set to  0.000000
10/15/2011	4:18:37 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	4:18:37 PM	Tube furnace set to 0
10/15/2011	4:18:38 PM	Run finished at 4:18 PM
10/15/2011	4:18:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/15/2011	4:26:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	4:26:25 PM	Recipe started at 4:26 PM
10/15/2011	4:26:25 PM	Helium valve closed
10/15/2011	4:26:25 PM	H2 valve closed
10/15/2011	4:26:25 PM	BCl3 valve closed
10/15/2011	4:26:25 PM	PH3 valve closed
10/15/2011	4:26:25 PM	SiCl4 pre valve closed
10/15/2011	4:26:25 PM	SiCl4 post valve closed
10/15/2011	4:26:25 PM	Main Vac valve closed
10/15/2011	4:26:25 PM	Bubbler valve closed
10/15/2011	4:26:25 PM	Bypass valve opened
10/15/2011	4:26:25 PM	Helium MFC set to  0.000000
10/15/2011	4:26:25 PM	H2 MFC set to  0.000000
10/15/2011	4:26:25 PM	BCl3 MFC set to  0.000000
10/15/2011	4:26:25 PM	PHl3 MFC set to  0.000000
10/15/2011	4:26:25 PM	SiCl4 MFC set to  0.000000
10/15/2011	4:26:25 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	4:26:25 PM	Tube furnace set to 0
10/15/2011	4:27:37 PM	Helium valve closed
10/15/2011	4:27:37 PM	H2 valve closed
10/15/2011	4:27:37 PM	BCl3 valve closed
10/15/2011	4:27:37 PM	PH3 valve closed
10/15/2011	4:27:37 PM	SiCl4 pre valve closed
10/15/2011	4:27:37 PM	SiCl4 post valve closed
10/15/2011	4:27:37 PM	Main Vac valve closed
10/15/2011	4:27:37 PM	Bubbler valve closed
10/15/2011	4:27:37 PM	Bypass valve opened
10/15/2011	4:27:37 PM	Helium MFC set to  0.000000
10/15/2011	4:27:37 PM	H2 MFC set to  0.000000
10/15/2011	4:27:37 PM	BCl3 MFC set to  0.000000
10/15/2011	4:27:37 PM	PHl3 MFC set to  0.000000
10/15/2011	4:27:37 PM	SiCl4 MFC set to  0.000000
10/15/2011	4:27:37 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	4:27:37 PM	Tube furnace set to 0
10/15/2011	4:28:38 PM	Helium valve closed
10/15/2011	4:28:38 PM	H2 valve closed
10/15/2011	4:28:38 PM	BCl3 valve closed
10/15/2011	4:28:38 PM	PH3 valve closed
10/15/2011	4:28:38 PM	SiCl4 pre valve closed
10/15/2011	4:28:38 PM	SiCl4 post valve closed
10/15/2011	4:28:38 PM	Bypass valve closed
10/15/2011	4:28:38 PM	Bubbler valve closed
10/15/2011	4:28:38 PM	Main Vac valve opened
10/15/2011	4:28:38 PM	Helium MFC set to  0.000000
10/15/2011	4:28:38 PM	H2 MFC set to  0.000000
10/15/2011	4:28:38 PM	BCl3 MFC set to  0.000000
10/15/2011	4:28:38 PM	PHl3 MFC set to  0.000000
10/15/2011	4:28:38 PM	SiCl4 MFC set to  0.000000
10/15/2011	4:28:38 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	4:28:38 PM	Tube furnace set to 0
10/15/2011	4:28:39 PM	Run finished at 4:28 PM
10/15/2011	4:28:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	7:43:21 PM	Recipe started at 7:43 PM
10/15/2011	7:43:21 PM	Helium valve closed
10/15/2011	7:43:21 PM	H2 valve closed
10/15/2011	7:43:21 PM	BCl3 valve closed
10/15/2011	7:43:21 PM	PH3 valve closed
10/15/2011	7:43:21 PM	SiCl4 pre valve closed
10/15/2011	7:43:21 PM	SiCl4 post valve closed
10/15/2011	7:43:21 PM	Bypass valve closed
10/15/2011	7:43:21 PM	Bubbler valve closed
10/15/2011	7:43:21 PM	Main Vac valve opened
10/15/2011	7:43:21 PM	Helium MFC set to  0.000000
10/15/2011	7:43:21 PM	H2 MFC set to  0.000000
10/15/2011	7:43:21 PM	BCl3 MFC set to  0.000000
10/15/2011	7:43:21 PM	PHl3 MFC set to  0.000000
10/15/2011	7:43:21 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:43:21 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:43:21 PM	Tube furnace set to 150
10/15/2011	7:43:22 PM	H2 valve closed
10/15/2011	7:43:22 PM	BCl3 valve closed
10/15/2011	7:43:22 PM	PH3 valve closed
10/15/2011	7:43:22 PM	SiCl4 pre valve closed
10/15/2011	7:43:22 PM	SiCl4 post valve closed
10/15/2011	7:43:22 PM	Bypass valve closed
10/15/2011	7:43:22 PM	Bubbler valve closed
10/15/2011	7:43:22 PM	Helium valve opened
10/15/2011	7:43:22 PM	Main Vac valve opened
10/15/2011	7:43:22 PM	Helium MFC set to  20.000000
10/15/2011	7:43:22 PM	H2 MFC set to  0.000000
10/15/2011	7:43:22 PM	BCl3 MFC set to  0.000000
10/15/2011	7:43:22 PM	PHl3 MFC set to  0.000000
10/15/2011	7:43:22 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:43:22 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:43:23 PM	Tube furnace set to 150
10/15/2011	7:43:53 PM	Helium valve closed
10/15/2011	7:43:53 PM	H2 valve closed
10/15/2011	7:43:53 PM	BCl3 valve closed
10/15/2011	7:43:53 PM	PH3 valve closed
10/15/2011	7:43:53 PM	SiCl4 pre valve closed
10/15/2011	7:43:53 PM	SiCl4 post valve closed
10/15/2011	7:43:53 PM	Bypass valve closed
10/15/2011	7:43:53 PM	Bubbler valve closed
10/15/2011	7:43:53 PM	Main Vac valve opened
10/15/2011	7:43:53 PM	Helium MFC set to  0.000000
10/15/2011	7:43:53 PM	H2 MFC set to  0.000000
10/15/2011	7:43:53 PM	BCl3 MFC set to  0.000000
10/15/2011	7:43:53 PM	PHl3 MFC set to  0.000000
10/15/2011	7:43:53 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:43:53 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:43:53 PM	Tube furnace set to 150
10/15/2011	7:44:23 PM	H2 valve closed
10/15/2011	7:44:23 PM	BCl3 valve closed
10/15/2011	7:44:23 PM	PH3 valve closed
10/15/2011	7:44:23 PM	SiCl4 pre valve closed
10/15/2011	7:44:23 PM	SiCl4 post valve closed
10/15/2011	7:44:23 PM	Bypass valve closed
10/15/2011	7:44:23 PM	Bubbler valve closed
10/15/2011	7:44:23 PM	Helium valve opened
10/15/2011	7:44:23 PM	Main Vac valve opened
10/15/2011	7:44:23 PM	Helium MFC set to  20.000000
10/15/2011	7:44:23 PM	H2 MFC set to  0.000000
10/15/2011	7:44:23 PM	BCl3 MFC set to  0.000000
10/15/2011	7:44:23 PM	PHl3 MFC set to  0.000000
10/15/2011	7:44:23 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:44:23 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:44:23 PM	Tube furnace set to 150
10/15/2011	7:44:53 PM	Helium valve closed
10/15/2011	7:44:53 PM	H2 valve closed
10/15/2011	7:44:53 PM	BCl3 valve closed
10/15/2011	7:44:53 PM	PH3 valve closed
10/15/2011	7:44:53 PM	SiCl4 pre valve closed
10/15/2011	7:44:53 PM	SiCl4 post valve closed
10/15/2011	7:44:53 PM	Bypass valve closed
10/15/2011	7:44:53 PM	Bubbler valve closed
10/15/2011	7:44:53 PM	Main Vac valve opened
10/15/2011	7:44:53 PM	Helium MFC set to  0.000000
10/15/2011	7:44:53 PM	H2 MFC set to  0.000000
10/15/2011	7:44:53 PM	BCl3 MFC set to  0.000000
10/15/2011	7:44:53 PM	PHl3 MFC set to  0.000000
10/15/2011	7:44:53 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:44:53 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:44:53 PM	Tube furnace set to 150
10/15/2011	7:45:23 PM	H2 valve closed
10/15/2011	7:45:23 PM	BCl3 valve closed
10/15/2011	7:45:23 PM	PH3 valve closed
10/15/2011	7:45:23 PM	SiCl4 pre valve closed
10/15/2011	7:45:23 PM	SiCl4 post valve closed
10/15/2011	7:45:23 PM	Bypass valve closed
10/15/2011	7:45:23 PM	Bubbler valve closed
10/15/2011	7:45:23 PM	Helium valve opened
10/15/2011	7:45:23 PM	Main Vac valve opened
10/15/2011	7:45:23 PM	Helium MFC set to  20.000000
10/15/2011	7:45:23 PM	H2 MFC set to  0.000000
10/15/2011	7:45:23 PM	BCl3 MFC set to  0.000000
10/15/2011	7:45:23 PM	PHl3 MFC set to  0.000000
10/15/2011	7:45:23 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:45:23 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:45:23 PM	Tube furnace set to 150
10/15/2011	7:45:53 PM	Helium valve closed
10/15/2011	7:45:53 PM	H2 valve closed
10/15/2011	7:45:53 PM	BCl3 valve closed
10/15/2011	7:45:53 PM	PH3 valve closed
10/15/2011	7:45:53 PM	SiCl4 pre valve closed
10/15/2011	7:45:53 PM	SiCl4 post valve closed
10/15/2011	7:45:53 PM	Bypass valve closed
10/15/2011	7:45:53 PM	Bubbler valve closed
10/15/2011	7:45:53 PM	Main Vac valve opened
10/15/2011	7:45:53 PM	Helium MFC set to  0.000000
10/15/2011	7:45:53 PM	H2 MFC set to  0.000000
10/15/2011	7:45:53 PM	BCl3 MFC set to  0.000000
10/15/2011	7:45:53 PM	PHl3 MFC set to  0.000000
10/15/2011	7:45:53 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:45:53 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:45:54 PM	Tube furnace set to 150
10/15/2011	7:46:24 PM	H2 valve closed
10/15/2011	7:46:24 PM	BCl3 valve closed
10/15/2011	7:46:24 PM	PH3 valve closed
10/15/2011	7:46:24 PM	SiCl4 pre valve closed
10/15/2011	7:46:24 PM	SiCl4 post valve closed
10/15/2011	7:46:24 PM	Bypass valve closed
10/15/2011	7:46:24 PM	Bubbler valve closed
10/15/2011	7:46:24 PM	Helium valve opened
10/15/2011	7:46:24 PM	Main Vac valve opened
10/15/2011	7:46:24 PM	Helium MFC set to  20.000000
10/15/2011	7:46:24 PM	H2 MFC set to  0.000000
10/15/2011	7:46:24 PM	BCl3 MFC set to  0.000000
10/15/2011	7:46:24 PM	PHl3 MFC set to  0.000000
10/15/2011	7:46:24 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:46:24 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:46:24 PM	Tube furnace set to 150
10/15/2011	7:46:54 PM	Helium valve closed
10/15/2011	7:46:54 PM	H2 valve closed
10/15/2011	7:46:54 PM	BCl3 valve closed
10/15/2011	7:46:54 PM	PH3 valve closed
10/15/2011	7:46:54 PM	SiCl4 pre valve closed
10/15/2011	7:46:54 PM	SiCl4 post valve closed
10/15/2011	7:46:54 PM	Bypass valve closed
10/15/2011	7:46:54 PM	Bubbler valve closed
10/15/2011	7:46:54 PM	Main Vac valve opened
10/15/2011	7:46:54 PM	Helium MFC set to  0.000000
10/15/2011	7:46:54 PM	H2 MFC set to  0.000000
10/15/2011	7:46:54 PM	BCl3 MFC set to  0.000000
10/15/2011	7:46:54 PM	PHl3 MFC set to  0.000000
10/15/2011	7:46:54 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:46:54 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:46:54 PM	Tube furnace set to 150
10/15/2011	7:47:24 PM	H2 valve closed
10/15/2011	7:47:24 PM	BCl3 valve closed
10/15/2011	7:47:24 PM	PH3 valve closed
10/15/2011	7:47:24 PM	SiCl4 pre valve closed
10/15/2011	7:47:24 PM	SiCl4 post valve closed
10/15/2011	7:47:24 PM	Bypass valve closed
10/15/2011	7:47:24 PM	Bubbler valve closed
10/15/2011	7:47:24 PM	Helium valve opened
10/15/2011	7:47:24 PM	Main Vac valve opened
10/15/2011	7:47:24 PM	Helium MFC set to  20.000000
10/15/2011	7:47:24 PM	H2 MFC set to  0.000000
10/15/2011	7:47:24 PM	BCl3 MFC set to  0.000000
10/15/2011	7:47:24 PM	PHl3 MFC set to  0.000000
10/15/2011	7:47:24 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:47:24 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:47:24 PM	Tube furnace set to 150
10/15/2011	7:47:54 PM	Helium valve closed
10/15/2011	7:47:54 PM	H2 valve closed
10/15/2011	7:47:54 PM	BCl3 valve closed
10/15/2011	7:47:54 PM	PH3 valve closed
10/15/2011	7:47:54 PM	SiCl4 pre valve closed
10/15/2011	7:47:54 PM	SiCl4 post valve closed
10/15/2011	7:47:54 PM	Bypass valve closed
10/15/2011	7:47:54 PM	Bubbler valve closed
10/15/2011	7:47:54 PM	Main Vac valve opened
10/15/2011	7:47:54 PM	Helium MFC set to  0.000000
10/15/2011	7:47:54 PM	H2 MFC set to  0.000000
10/15/2011	7:47:54 PM	BCl3 MFC set to  0.000000
10/15/2011	7:47:54 PM	PHl3 MFC set to  0.000000
10/15/2011	7:47:54 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:47:54 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:47:54 PM	Tube furnace set to 150
10/15/2011	7:48:24 PM	H2 valve closed
10/15/2011	7:48:24 PM	BCl3 valve closed
10/15/2011	7:48:24 PM	PH3 valve closed
10/15/2011	7:48:24 PM	SiCl4 pre valve closed
10/15/2011	7:48:25 PM	SiCl4 post valve closed
10/15/2011	7:48:25 PM	Bypass valve closed
10/15/2011	7:48:25 PM	Bubbler valve closed
10/15/2011	7:48:25 PM	Helium valve opened
10/15/2011	7:48:25 PM	Main Vac valve opened
10/15/2011	7:48:25 PM	Helium MFC set to  20.000000
10/15/2011	7:48:25 PM	H2 MFC set to  0.000000
10/15/2011	7:48:25 PM	BCl3 MFC set to  0.000000
10/15/2011	7:48:25 PM	PHl3 MFC set to  0.000000
10/15/2011	7:48:25 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:48:25 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:48:25 PM	Tube furnace set to 150
10/15/2011	7:48:55 PM	Helium valve closed
10/15/2011	7:48:55 PM	H2 valve closed
10/15/2011	7:48:55 PM	BCl3 valve closed
10/15/2011	7:48:55 PM	PH3 valve closed
10/15/2011	7:48:55 PM	SiCl4 pre valve closed
10/15/2011	7:48:55 PM	SiCl4 post valve closed
10/15/2011	7:48:55 PM	Bypass valve closed
10/15/2011	7:48:55 PM	Bubbler valve closed
10/15/2011	7:48:55 PM	Main Vac valve opened
10/15/2011	7:48:55 PM	Helium MFC set to  0.000000
10/15/2011	7:48:55 PM	H2 MFC set to  0.000000
10/15/2011	7:48:55 PM	BCl3 MFC set to  0.000000
10/15/2011	7:48:55 PM	PHl3 MFC set to  0.000000
10/15/2011	7:48:55 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:48:55 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:48:55 PM	Tube furnace set to 150
10/15/2011	7:49:25 PM	H2 valve closed
10/15/2011	7:49:25 PM	BCl3 valve closed
10/15/2011	7:49:25 PM	PH3 valve closed
10/15/2011	7:49:25 PM	SiCl4 pre valve closed
10/15/2011	7:49:25 PM	SiCl4 post valve closed
10/15/2011	7:49:25 PM	Bypass valve closed
10/15/2011	7:49:25 PM	Bubbler valve closed
10/15/2011	7:49:25 PM	Helium valve opened
10/15/2011	7:49:25 PM	Main Vac valve opened
10/15/2011	7:49:25 PM	Helium MFC set to  20.000000
10/15/2011	7:49:25 PM	H2 MFC set to  0.000000
10/15/2011	7:49:25 PM	BCl3 MFC set to  0.000000
10/15/2011	7:49:25 PM	PHl3 MFC set to  0.000000
10/15/2011	7:49:25 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:49:25 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:49:25 PM	Tube furnace set to 150
10/15/2011	7:49:55 PM	Helium valve closed
10/15/2011	7:49:55 PM	H2 valve closed
10/15/2011	7:49:55 PM	BCl3 valve closed
10/15/2011	7:49:55 PM	PH3 valve closed
10/15/2011	7:49:55 PM	SiCl4 pre valve closed
10/15/2011	7:49:55 PM	SiCl4 post valve closed
10/15/2011	7:49:55 PM	Bypass valve closed
10/15/2011	7:49:55 PM	Bubbler valve closed
10/15/2011	7:49:55 PM	Main Vac valve opened
10/15/2011	7:49:55 PM	Helium MFC set to  0.000000
10/15/2011	7:49:55 PM	H2 MFC set to  0.000000
10/15/2011	7:49:55 PM	BCl3 MFC set to  0.000000
10/15/2011	7:49:55 PM	PHl3 MFC set to  0.000000
10/15/2011	7:49:55 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:49:55 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:49:55 PM	Tube furnace set to 150
10/15/2011	7:50:25 PM	H2 valve closed
10/15/2011	7:50:25 PM	BCl3 valve closed
10/15/2011	7:50:25 PM	PH3 valve closed
10/15/2011	7:50:25 PM	SiCl4 pre valve closed
10/15/2011	7:50:25 PM	SiCl4 post valve closed
10/15/2011	7:50:25 PM	Bypass valve closed
10/15/2011	7:50:25 PM	Bubbler valve closed
10/15/2011	7:50:25 PM	Helium valve opened
10/15/2011	7:50:25 PM	Main Vac valve opened
10/15/2011	7:50:25 PM	Helium MFC set to  20.000000
10/15/2011	7:50:25 PM	H2 MFC set to  0.000000
10/15/2011	7:50:25 PM	BCl3 MFC set to  0.000000
10/15/2011	7:50:25 PM	PHl3 MFC set to  0.000000
10/15/2011	7:50:25 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:50:25 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:50:26 PM	Tube furnace set to 150
10/15/2011	7:50:56 PM	Helium valve closed
10/15/2011	7:50:56 PM	H2 valve closed
10/15/2011	7:50:56 PM	BCl3 valve closed
10/15/2011	7:50:56 PM	PH3 valve closed
10/15/2011	7:50:56 PM	SiCl4 pre valve closed
10/15/2011	7:50:56 PM	SiCl4 post valve closed
10/15/2011	7:50:56 PM	Bypass valve closed
10/15/2011	7:50:56 PM	Bubbler valve closed
10/15/2011	7:50:56 PM	Main Vac valve opened
10/15/2011	7:50:56 PM	Helium MFC set to  0.000000
10/15/2011	7:50:56 PM	H2 MFC set to  0.000000
10/15/2011	7:50:56 PM	BCl3 MFC set to  0.000000
10/15/2011	7:50:56 PM	PHl3 MFC set to  0.000000
10/15/2011	7:50:56 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:50:56 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:50:56 PM	Tube furnace set to 150
10/15/2011	7:51:26 PM	H2 valve closed
10/15/2011	7:51:26 PM	BCl3 valve closed
10/15/2011	7:51:26 PM	PH3 valve closed
10/15/2011	7:51:26 PM	SiCl4 pre valve closed
10/15/2011	7:51:26 PM	SiCl4 post valve closed
10/15/2011	7:51:26 PM	Bypass valve closed
10/15/2011	7:51:26 PM	Bubbler valve closed
10/15/2011	7:51:26 PM	Helium valve opened
10/15/2011	7:51:26 PM	Main Vac valve opened
10/15/2011	7:51:26 PM	Helium MFC set to  20.000000
10/15/2011	7:51:26 PM	H2 MFC set to  0.000000
10/15/2011	7:51:26 PM	BCl3 MFC set to  0.000000
10/15/2011	7:51:26 PM	PHl3 MFC set to  0.000000
10/15/2011	7:51:26 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:51:26 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:51:26 PM	Tube furnace set to 150
10/15/2011	7:51:56 PM	Helium valve closed
10/15/2011	7:51:56 PM	H2 valve closed
10/15/2011	7:51:56 PM	BCl3 valve closed
10/15/2011	7:51:56 PM	PH3 valve closed
10/15/2011	7:51:56 PM	SiCl4 pre valve closed
10/15/2011	7:51:56 PM	SiCl4 post valve closed
10/15/2011	7:51:56 PM	Bypass valve closed
10/15/2011	7:51:56 PM	Bubbler valve closed
10/15/2011	7:51:56 PM	Main Vac valve opened
10/15/2011	7:51:56 PM	Helium MFC set to  0.000000
10/15/2011	7:51:56 PM	H2 MFC set to  0.000000
10/15/2011	7:51:56 PM	BCl3 MFC set to  0.000000
10/15/2011	7:51:56 PM	PHl3 MFC set to  0.000000
10/15/2011	7:51:56 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:51:56 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:51:56 PM	Tube furnace set to 150
10/15/2011	7:52:26 PM	H2 valve closed
10/15/2011	7:52:26 PM	BCl3 valve closed
10/15/2011	7:52:26 PM	PH3 valve closed
10/15/2011	7:52:26 PM	SiCl4 pre valve closed
10/15/2011	7:52:26 PM	SiCl4 post valve closed
10/15/2011	7:52:26 PM	Bypass valve closed
10/15/2011	7:52:26 PM	Bubbler valve closed
10/15/2011	7:52:26 PM	Helium valve opened
10/15/2011	7:52:26 PM	Main Vac valve opened
10/15/2011	7:52:26 PM	Helium MFC set to  20.000000
10/15/2011	7:52:26 PM	H2 MFC set to  0.000000
10/15/2011	7:52:26 PM	BCl3 MFC set to  0.000000
10/15/2011	7:52:26 PM	PHl3 MFC set to  0.000000
10/15/2011	7:52:26 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:52:26 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:52:26 PM	Tube furnace set to 150
10/15/2011	7:52:56 PM	Helium valve closed
10/15/2011	7:52:56 PM	H2 valve closed
10/15/2011	7:52:56 PM	BCl3 valve closed
10/15/2011	7:52:56 PM	PH3 valve closed
10/15/2011	7:52:56 PM	SiCl4 pre valve closed
10/15/2011	7:52:56 PM	SiCl4 post valve closed
10/15/2011	7:52:56 PM	Bypass valve closed
10/15/2011	7:52:56 PM	Bubbler valve closed
10/15/2011	7:52:56 PM	Main Vac valve opened
10/15/2011	7:52:56 PM	Helium MFC set to  0.000000
10/15/2011	7:52:56 PM	H2 MFC set to  0.000000
10/15/2011	7:52:56 PM	BCl3 MFC set to  0.000000
10/15/2011	7:52:56 PM	PHl3 MFC set to  0.000000
10/15/2011	7:52:56 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:52:56 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:52:57 PM	Tube furnace set to 150
10/15/2011	7:52:58 PM	Run finished at 7:52 PM
10/15/2011	7:54:03 PM	Main Vac valve closed
10/15/2011	7:54:41 PM	Main Vac valve opened
10/15/2011	7:56:34 PM	Recipe started at 7:56 PM
10/15/2011	7:56:34 PM	Helium valve closed
10/15/2011	7:56:34 PM	H2 valve closed
10/15/2011	7:56:34 PM	BCl3 valve closed
10/15/2011	7:56:34 PM	PH3 valve closed
10/15/2011	7:56:34 PM	SiCl4 pre valve closed
10/15/2011	7:56:34 PM	SiCl4 post valve closed
10/15/2011	7:56:34 PM	Main Vac valve closed
10/15/2011	7:56:34 PM	Bypass valve closed
10/15/2011	7:56:34 PM	Bubbler valve closed
10/15/2011	7:56:34 PM	Helium MFC set to  0.000000
10/15/2011	7:56:34 PM	H2 MFC set to  0.000000
10/15/2011	7:56:34 PM	BCl3 MFC set to  0.000000
10/15/2011	7:56:34 PM	PHl3 MFC set to  0.000000
10/15/2011	7:56:34 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:56:34 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:56:34 PM	Tube furnace set to 0
10/15/2011	7:56:37 PM	Helium valve closed
10/15/2011	7:56:37 PM	BCl3 valve closed
10/15/2011	7:56:37 PM	PH3 valve closed
10/15/2011	7:56:37 PM	SiCl4 pre valve closed
10/15/2011	7:56:37 PM	SiCl4 post valve closed
10/15/2011	7:56:37 PM	Main Vac valve closed
10/15/2011	7:56:37 PM	Bypass valve closed
10/15/2011	7:56:37 PM	Bubbler valve closed
10/15/2011	7:56:37 PM	H2 valve opened
10/15/2011	7:56:37 PM	Helium MFC set to  0.000000
10/15/2011	7:56:37 PM	H2 MFC set to  500.000000
10/15/2011	7:56:37 PM	BCl3 MFC set to  0.000000
10/15/2011	7:56:37 PM	PHl3 MFC set to  0.000000
10/15/2011	7:56:37 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:56:37 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:56:37 PM	Tube furnace set to 0
10/15/2011	7:57:41 PM	Helium valve closed
10/15/2011	7:57:41 PM	BCl3 valve closed
10/15/2011	7:57:41 PM	PH3 valve closed
10/15/2011	7:57:41 PM	SiCl4 pre valve closed
10/15/2011	7:57:41 PM	SiCl4 post valve closed
10/15/2011	7:57:41 PM	Main Vac valve closed
10/15/2011	7:57:41 PM	Bypass valve closed
10/15/2011	7:57:41 PM	H2 valve opened
10/15/2011	7:57:41 PM	Bubbler valve opened
10/15/2011	7:57:41 PM	Helium MFC set to  0.000000
10/15/2011	7:57:41 PM	H2 MFC set to  500.000000
10/15/2011	7:57:41 PM	BCl3 MFC set to  0.000000
10/15/2011	7:57:41 PM	PHl3 MFC set to  0.000000
10/15/2011	7:57:41 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:57:41 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:57:41 PM	Tube furnace set to 0
10/15/2011	7:57:42 PM	Helium valve closed
10/15/2011	7:57:42 PM	BCl3 valve closed
10/15/2011	7:57:42 PM	PH3 valve closed
10/15/2011	7:57:42 PM	SiCl4 pre valve closed
10/15/2011	7:57:42 PM	SiCl4 post valve closed
10/15/2011	7:57:42 PM	Main Vac valve closed
10/15/2011	7:57:42 PM	Bypass valve closed
10/15/2011	7:57:42 PM	H2 valve opened
10/15/2011	7:57:42 PM	Bubbler valve opened
10/15/2011	7:57:42 PM	Helium MFC set to  0.000000
10/15/2011	7:57:42 PM	H2 MFC set to  500.000000
10/15/2011	7:57:42 PM	BCl3 MFC set to  0.000000
10/15/2011	7:57:42 PM	PHl3 MFC set to  0.000000
10/15/2011	7:57:42 PM	SiCl4 MFC set to  0.000000
10/15/2011	7:57:43 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	7:57:43 PM	Tube furnace set to 1000
10/15/2011	8:17:43 PM	Helium valve closed
10/15/2011	8:17:43 PM	PH3 valve closed
10/15/2011	8:17:43 PM	Main Vac valve closed
10/15/2011	8:17:43 PM	Bypass valve closed
10/15/2011	8:17:43 PM	H2 valve opened
10/15/2011	8:17:43 PM	BCl3 valve opened
10/15/2011	8:17:43 PM	SiCl4 pre valve opened
10/15/2011	8:17:43 PM	SiCl4 post valve opened
10/15/2011	8:17:43 PM	Bubbler valve opened
10/15/2011	8:17:43 PM	Helium MFC set to  0.000000
10/15/2011	8:17:43 PM	H2 MFC set to  500.000000
10/15/2011	8:17:43 PM	BCl3 MFC set to  2.500000
10/15/2011	8:17:43 PM	PHl3 MFC set to  0.000000
10/15/2011	8:17:43 PM	SiCl4 MFC set to  50.000000
10/15/2011	8:17:43 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	8:17:43 PM	Tube furnace set to 1000
10/15/2011	8:32:43 PM	Helium valve closed
10/15/2011	8:32:43 PM	BCl3 valve closed
10/15/2011	8:32:43 PM	PH3 valve closed
10/15/2011	8:32:43 PM	SiCl4 pre valve closed
10/15/2011	8:32:43 PM	SiCl4 post valve closed
10/15/2011	8:32:43 PM	Main Vac valve closed
10/15/2011	8:32:43 PM	Bypass valve closed
10/15/2011	8:32:43 PM	H2 valve opened
10/15/2011	8:32:43 PM	Bubbler valve opened
10/15/2011	8:32:43 PM	Helium MFC set to  0.000000
10/15/2011	8:32:43 PM	H2 MFC set to  500.000000
10/15/2011	8:32:43 PM	BCl3 MFC set to  0.000000
10/15/2011	8:32:43 PM	PHl3 MFC set to  0.000000
10/15/2011	8:32:43 PM	SiCl4 MFC set to  0.000000
10/15/2011	8:32:43 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	8:32:43 PM	Tube furnace set to 750
10/15/2011	8:37:43 PM	H2 valve closed
10/15/2011	8:37:43 PM	BCl3 valve closed
10/15/2011	8:37:43 PM	PH3 valve closed
10/15/2011	8:37:43 PM	SiCl4 pre valve closed
10/15/2011	8:37:43 PM	SiCl4 post valve closed
10/15/2011	8:37:43 PM	Main Vac valve closed
10/15/2011	8:37:43 PM	Bypass valve closed
10/15/2011	8:37:43 PM	Helium valve opened
10/15/2011	8:37:43 PM	Bubbler valve opened
10/15/2011	8:37:43 PM	Helium MFC set to  500.000000
10/15/2011	8:37:43 PM	H2 MFC set to  0.000000
10/15/2011	8:37:43 PM	BCl3 MFC set to  0.000000
10/15/2011	8:37:43 PM	PHl3 MFC set to  0.000000
10/15/2011	8:37:43 PM	SiCl4 MFC set to  0.000000
10/15/2011	8:37:43 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	8:37:43 PM	Tube furnace set to 0
10/15/2011	8:57:43 PM	Helium valve closed
10/15/2011	8:57:43 PM	H2 valve closed
10/15/2011	8:57:43 PM	BCl3 valve closed
10/15/2011	8:57:43 PM	PH3 valve closed
10/15/2011	8:57:43 PM	SiCl4 pre valve closed
10/15/2011	8:57:43 PM	SiCl4 post valve closed
10/15/2011	8:57:43 PM	Main Vac valve closed
10/15/2011	8:57:43 PM	Bypass valve closed
10/15/2011	8:57:43 PM	Bubbler valve closed
10/15/2011	8:57:43 PM	Helium MFC set to  0.000000
10/15/2011	8:57:43 PM	H2 MFC set to  0.000000
10/15/2011	8:57:43 PM	BCl3 MFC set to  0.000000
10/15/2011	8:57:43 PM	PHl3 MFC set to  0.000000
10/15/2011	8:57:43 PM	SiCl4 MFC set to  0.000000
10/15/2011	8:57:43 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	8:57:43 PM	Tube furnace set to 0
10/15/2011	8:57:44 PM	Run finished at 8:57 PM
10/15/2011	9:04:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/15/2011	9:04:10 PM	Recipe started at 9:04 PM
10/15/2011	9:04:10 PM	Helium valve closed
10/15/2011	9:04:10 PM	H2 valve closed
10/15/2011	9:04:10 PM	BCl3 valve closed
10/15/2011	9:04:10 PM	PH3 valve closed
10/15/2011	9:04:10 PM	SiCl4 pre valve closed
10/15/2011	9:04:10 PM	SiCl4 post valve closed
10/15/2011	9:04:10 PM	Main Vac valve closed
10/15/2011	9:04:10 PM	Bubbler valve closed
10/15/2011	9:04:10 PM	Bypass valve opened
10/15/2011	9:04:10 PM	Helium MFC set to  0.000000
10/15/2011	9:04:10 PM	H2 MFC set to  0.000000
10/15/2011	9:04:10 PM	BCl3 MFC set to  0.000000
10/15/2011	9:04:10 PM	PHl3 MFC set to  0.000000
10/15/2011	9:04:10 PM	SiCl4 MFC set to  0.000000
10/15/2011	9:04:10 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:04:10 PM	Tube furnace set to 0
10/15/2011	9:05:20 PM	Helium valve closed
10/15/2011	9:05:20 PM	H2 valve closed
10/15/2011	9:05:20 PM	BCl3 valve closed
10/15/2011	9:05:20 PM	PH3 valve closed
10/15/2011	9:05:20 PM	SiCl4 pre valve closed
10/15/2011	9:05:20 PM	SiCl4 post valve closed
10/15/2011	9:05:20 PM	Main Vac valve closed
10/15/2011	9:05:20 PM	Bubbler valve closed
10/15/2011	9:05:20 PM	Bypass valve opened
10/15/2011	9:05:20 PM	Helium MFC set to  0.000000
10/15/2011	9:05:20 PM	H2 MFC set to  0.000000
10/15/2011	9:05:20 PM	BCl3 MFC set to  0.000000
10/15/2011	9:05:20 PM	PHl3 MFC set to  0.000000
10/15/2011	9:05:20 PM	SiCl4 MFC set to  0.000000
10/15/2011	9:05:20 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:05:20 PM	Tube furnace set to 0
10/15/2011	9:06:20 PM	Helium valve closed
10/15/2011	9:06:20 PM	H2 valve closed
10/15/2011	9:06:20 PM	BCl3 valve closed
10/15/2011	9:06:20 PM	PH3 valve closed
10/15/2011	9:06:20 PM	SiCl4 pre valve closed
10/15/2011	9:06:20 PM	SiCl4 post valve closed
10/15/2011	9:06:20 PM	Bypass valve closed
10/15/2011	9:06:20 PM	Bubbler valve closed
10/15/2011	9:06:20 PM	Main Vac valve opened
10/15/2011	9:06:20 PM	Helium MFC set to  0.000000
10/15/2011	9:06:20 PM	H2 MFC set to  0.000000
10/15/2011	9:06:20 PM	BCl3 MFC set to  0.000000
10/15/2011	9:06:20 PM	PHl3 MFC set to  0.000000
10/15/2011	9:06:20 PM	SiCl4 MFC set to  0.000000
10/15/2011	9:06:20 PM	Bypass solenoid MFC set to  0.000000
10/15/2011	9:06:20 PM	Tube furnace set to 0
10/15/2011	9:06:21 PM	Run finished at 9:06 PM
10/15/2011	9:06:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
